Bringing Green Power To Life.

Bringing Green Power To Life.

Products

Wafer size_G12_N-TYPE

Geometric parameters

Specifications Specifications Unit Test Tools Test Standard
Thickness 130-10/+20 μm AOI /
Total thickness variation ≤ 27 μm AOI ASTM F657
Warp ≤ 40 μm AOI ASTM F657
Side length 210 ± 0.25 mm AOI /
Diameter 295 ± 0.25 mm AOI /
Perpendicularity 90 ± 0.2 AOI /

Defect detection

Specifications Specifications Unit Test Tools Test Standard
Scratch/groove edge/Hole NONE / OI/visual inspection /
Dirt/haze/surface metal contamination ≤ 27 μm AOI/visual inspection ASTM F657
Edge chipping Length≤ 500Width≤ 300 μm AOI/visual inspection Quantity≤ 1
RY ≤ 15 μm AOI/MITUTOYO /
Crack NONE / AOI/visual inspection /
Line direction Horizontal / visual inspection /
Wafer size_G12_P-TYPE

Geometric parameters

Specifications Specifications Unit Test Tools Test Standard
Thickness 150-10/+20 μm AOI /
Total thickness variation ≤ 27 μm AOI ASTM F657
Warp ≤ 40 μm AOI ASTM F657
Side length 210 ± 0.25 mm AOI /
Diameter 295 ± 0.25 mm AOI /
Perpendicularity 90 ± 0.2 AOI /

Defect detection

Specifications Specifications Unit Test Tools Test Standard
Scratch/groove edge/Hole NONE / OI/visual inspection /
Dirt/haze/surface metal contamination NONE / AOI/visual inspection /
Edge chipping Length≤ 500 Width≤ 300 μm AOI/visual inspection Quantity≤ 1
RY ≤ 15 μm AOI/MITUTOYO /
Crack NONE / AOI/visual inspection /
Line direction Horizontal / visual inspection /
Wafer size_G12+_P-TYPE

Geometric parameters

Specifications Specifications Unit Test Tools Test Standard
Thickness 150-10/+20 μm AOI /
Total thickness variation ≤ 27 μm AOI ASTM F657
Warp ≤ 40 μm AOI ASTM F657
Side length 210 ± 0.25 mm AOI /
Diameter 295 ± 0.25 mm AOI /
Perpendicularity 90 ± 0.2 AOI /

Defect detection

Specifications Specifications Unit Test Tools Test Standard
Scratch/groove edge/Hole NONE / OI/visual inspection /
Dirt/haze/surface metal contamination NONE / AOI/visual inspection /
Edge chipping Length≤ 500 Width≤ 300 μm AOI/visual inspection Quantity≤ 1
RY ≤ 15 μm AOI/MITUTOYO /
Crack NONE / AOI/visual inspection /
Line direction Horizontal / visual inspection /
Wafer size_M10_N-TYPE

Geometric parameters

Specifications Specifications Unit Test Tools Test Standard
Thickness 130-10/+10 μm AOI /
Total thickness variation ≤ 27 μm AOI ASTM F657
Warp ≤ 40 μm AOI ASTM F657
Side length 182 ± 0.25 mm AOI /
Diameter 247 ± 0.25 mm AOI /
Perpendicularity 90 ± 0.2 AOI /

Defect detection

Specifications Specifications Unit Test Tools Test Standard
Scratch/groove edge/Hole NONE / OI/visual inspection /
Dirt/haze/surface metal contamination NONE / AOI/visual inspection /
Edge chipping Length≤ 500 Width≤ 300 μm AOI/visual inspection Quantity≤ 1
RY ≤ 13 μm AOI/MITUTOYO /
Crack NONE / AOI/visual inspection /
Line direction Horizontal / visual inspection /
Wafer size_M10_P-TYPE

Geometric parameters

Specifications Specifications Unit Test Tools Test Standard
Thickness 150-10/+20 μm AOI /
Total thickness variation ≤ 27 μm AOI ASTM F657
Warp ≤ 40 μm AOI ASTM F657
Side length 182 ± 0.25 mm AOI /
Diameter 247 ± 0.25 mm AOI /
Perpendicularity 90 ± 0.2 AOI /

Defect detection

Specifications Specifications Unit Test Tools Test Standard
Scratch/groove edge/Hole NONE / OI/visual inspection /
Dirt/haze/surface metal contamination NONE / AOI/visual inspection /
Edge chipping Length≤ 500 Width≤ 300 μm AOI/visual inspection Quantity≤ 1
RY ≤ 15 μm AOI/MITUTOYO /
Crack NONE / AOI/visual inspection /
Line direction Horizontal / visual inspection /
+